Full Factorial Design (2k) for 45 Degree of Wall Angle in Anisotropic Wet Etching Process
نویسندگان
چکیده
منابع مشابه
Wet anisotropic etching of polyimide
With the aim of developing flexible biocompatible implants for in vivo studies of nerve regeneration [1], fabrication of passive polyimide membranes using the commercial available Kapton film (100HN and 50HN, from DuPont) was investigated. Polyimide has been widely used in microelectronics, and its application possibilities have been widening to other fields such as micromachining and biomedica...
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ژورنال
عنوان ژورنال: JOURNAL OF MECHANICS OF CONTINUA AND MATHEMATICAL SCIENCES
سال: 2019
ISSN: 0973-8975,2454-7190
DOI: 10.26782/jmcms.2019.06.00001